Vacuum deposition system and method

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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Details

118719, 118729, 204298, C23C 1500

Patent

active

042749360

ABSTRACT:
A large scale vacuum deposition facility is disclosed in which substrates, in the form of architectural glass lights on supporting racks, are moved through an evacuated working chamber system where the substrates are coated by cathodic sputtering. The substrate racks are moved by a conveyor system through the working chamber system via an access chamber system, enabling substantially continuous production of coated substrates without requiring the working chamber system be opened to atmosphere.
Operation of the working chamber system, the access chamber system, the conveyor system and associated components is monitored and governed from a process control console.

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