Vacuum deposition method for frequency adjustment of piezoelectr

Details Vacuum deposition method for frequency adjustment of piezoelectr Vacuum deposition method for frequency adjustment of piezoelectr

1976-03-22

1978-09-05

Lesmes, George F.

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

29 2535, 427100, 427124, 427248R, 427250, B05D 512, C23C 1304

Patent

active

041121341

ABSTRACT:
Vacuum deposition method for adjusting the resonant frequency of piezoelectric resonators wherein the speed and accuracy of the process are enhanced by abrupt termination of the deposition through injection of a gas into the vacuum chamber at the end of the adjustment cycle.

REFERENCES:
patent: 2123227 (1938-07-01), Bieling
patent: 2978364 (1961-04-01), Blaustein
patent: 3383238 (1968-05-01), Unzicker et al.
patent: 3400014 (1968-09-01), Blumberg et al.
patent: 3486217 (1969-12-01), Congleton et al.
patent: 3498818 (1970-03-01), Bahm et al.
patent: 3549414 (1970-12-01), Curran et al.
patent: 3573960 (1971-04-01), Duncan

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