Vacuum deposition apparatus for manufacturing selenium photorece

Details Vacuum deposition apparatus for manufacturing selenium photorece Vacuum deposition apparatus for manufacturing selenium photorece

1983-01-05

1985-04-02

Lawrence, Evan K.

Coating apparatus

With indicating, testing, inspecting, or measuring means

118 501, 118723, 118730, C23C 1312

Patent

active

045080534

ABSTRACT:
A vapor deposition apparatus including a vacuum chamber, a vacuum pump for evacuating the chamber, and a mounting assembly disposed within the chamber and adapted to support and electrically isolate a plurality of substrate electrode units to be coated. Electrical couplings connect the electrode units to a power supply that establishes therebetween potential gradients that produce a glow discharge and resultant heating thereof. Also disposed within the vacuum chamber is a source of evaporative coating for deposition on the glow discharge heated electrode units.

REFERENCES:
patent: 4223048 (1980-09-01), Engle, Jr.

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