Coating apparatus – Gas or vapor deposition – With treating means
Patent
1979-02-07
1981-12-22
Kaplan, Morris
Coating apparatus
Gas or vapor deposition
With treating means
C23C 1308
Patent
active
043065155
ABSTRACT:
The vacuum treating device, comprises a housing defining an interior treatment chamber which is connected to a pump for evacuating the chamber. The carrier for holding a product is mounted within the housing in opposition to a holder for the material which is to be vaporized to form a coating. The support structure is mounted within the housing at a spaced location from each of the walls thereof and it provides means for supporting a heatable foil material. In addition, a heater is provided for heating the foil which is located between the foil and the corresponding wall and advantageously comprises a heater which is heatable by an electric current. The heater may be a device, for example, which produces a gas discharge using an electrode. The construction includes an interior frame having posts for supporting the electrical heater and provisions for supporting the foil which advantageously comprises individual magnets which are positioned over the metal frame.
REFERENCES:
patent: 2239452 (1941-04-01), Williams et al.
patent: 2398382 (1946-04-01), Lyon
patent: 2727167 (1955-12-01), Alpert
patent: 3324825 (1967-06-01), Brumfield
patent: 3678889 (1972-07-01), Murakami et al.
patent: 3862397 (1975-01-01), Anderson et al.
Balzers Patent- und Beteilingungs-Aktiengesellschaft
Kaplan Morris
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