Vacuum deposition apparatus

Details Vacuum deposition apparatus Vacuum deposition apparatus

1978-05-15

1980-06-03

Louie, Jr., Won H.

Coating apparatus

Gas or vapor deposition

C23C 1308

Patent

active

042056233

ABSTRACT:
A thin-film deposition apparatus comprises a cabinet having a vessel mounted therein which defines a vacuum chamber adapted to retain processed articles. A vacuum unit is mounted in the cabinet to communicate with an opening defined in the vacuum chamber whereby the chamber may be evacuated upon actuation of the pump of the vacuum unit. A door is movably mounted on a front panel of the cabinet for movement between closed and opened positions and a fan is preferably mounted on the cabinet and above the door to blow a laminar airflow over the front panel of the cabinet.

REFERENCES:
patent: 3238918 (1966-03-01), Radke et al.
patent: 3368523 (1968-02-01), Becker
patent: 3643625 (1972-02-01), Mahl
patent: 3892198 (1975-07-01), Dobson

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