Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1988-03-21
1989-07-25
McGraw, Vincent P.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
250223B, G01N 2188, G01N 2190
Patent
active
048506966
ABSTRACT:
A vacuum degree inspecting device wherein a high degree of accuracy is not required for positioning of an object vessel and the degree of vacuum of an object vessel can be detected with a high S/N ratio under a reduced influence of fluctuations in size or configuration of a top (lid) wall of an object vessel. The device comprises a great diameter lens for refracting rays of light from a light source into rays of light to be irradiated upon an area including a lid wall of a sealed up vessel held at a predetermined inspection position, a beam splitter for passing part of rays from the great diameter lens therethrough and for reflecting reflected rays from the lid wall of the sealed up vessel, a condenser lens for condensing reflected rays from the beam splitter, an image sensor for detecting the thus condensed rays, and a comparator circuit for comparing an output voltage of the image sensor with a reference voltage to develop a signal representing that the sealed up vessel is acceptable or to be rejected.
REFERENCES:
patent: 2524929 (1950-10-01), Razek
patent: 3131815 (1964-05-01), Mathias
patent: 4483615 (1984-11-01), Bieringer et al.
patent: 4758084 (1988-07-01), Tokumi et al.
Gomibuchi Tadashi
Yamato Yoshihiro
McGraw Vincent P.
Toyo Glass Company Limited
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