Vacuum cryopump with improved first stage

Details Vacuum cryopump with improved first stage Vacuum cryopump with improved first stage

1988-03-21

1989-03-28

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 417901, B01D 800

Patent

active

048153036

ABSTRACT:
A two stage cryopump with an improved first stage for condensing water vapor at high speed independently of the rate of gas flow into the second stage and without increasing the heat load on the cryopump. The cryopump utilizes a low profile high precision variable aperture to control flow to a lower baffle obstructing the mouth of a shroud containing the second stage, utilizes a support shaft mounted on the top of the lower baffle and extending upstream through the aperture, and utilizes an upper baffle mounted on the top of the shaft in thermal contact with the lower baffle to condense water vapor before reaching the aperture.

REFERENCES:
patent: 4094492 (1978-05-01), Beeman
patent: 4285710 (1981-08-01), Welch
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4479360 (1984-10-01), Bachler et al.
patent: 4531372 (1985-07-01), Slabaugh
patent: 4611467 (1986-09-01), Peterson
patent: 4614093 (1986-09-01), Bachler et al.

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