Vacuum contact printing system and process for electronic circui

Details Vacuum contact printing system and process for electronic circui Vacuum contact printing system and process for electronic circui

1976-01-12

1977-02-15

Moses, R. L.

Photocopying

Contact printing

Fluid pressure retention of carrier and receiver in exposure...

355132, G03B 2720

Patent

active

040079872

ABSTRACT:
There is disclosed a vacuum contact printer and process for printing copy plates from master photomask plates depicting electronic circuitry.
The printer embodies a vacuum-tight enclosure or casing, containing three vacuum chambers, two outside master and copy plate plenum chambers, and an intermediate main chamber. Retainers for the master and copy chambers hold and frame the master photomask and copy plates, respectively, and these retainers are mounted in confronting printing frames. The one of these printing frames which supports the master photomask plate is carried by a mounting plate fixed to an outside casing, and the other of the printing frames is carried by a swinging door of this casing. The master and copy photomask plates form partitions across the interior of the casing, and are positioned against flexible elastomeric framing seals, which complete these partitions. The photomask plates and their seals thus form two outside plenum chambers and one intermediate plenum chamber, and can be evacuated, and re-pressurized, in various ways to cause the two photomask plates, which are normally in contact, to separate by a small distance, such as 0.040 inch, or to softly contact one another, or do so under substantial pressure, for contact printing.

REFERENCES:
patent: 3604800 (1971-09-01), Jordan et al.
patent: 3645622 (1972-02-01), Cochon et al.
patent: 3858978 (1975-01-01), Johannsmeir
"Mask to Mask Contact Printer," H. Rottmann et al., IBM Tech. Bull., vol. 14, No. 10, Mar. '72, p. 2912.

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