Vacuum compatible linear motion device

Details Vacuum compatible linear motion device Vacuum compatible linear motion device

1996-12-13

1998-07-28

Herrmann, Allan D.

Machine element or mechanism

Control lever and linkage systems

Multiple controlling elements for single controlled element

74 182, 25044211, 2504922, 277 3, 277212FB, 384 12, G05G 1100, F16C 3306, F16J 1552

Patent

active

057849250

ABSTRACT:
A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.

REFERENCES:
patent: 4058018 (1977-11-01), Lauper
patent: 4417770 (1983-11-01), Tucker
patent: 4462580 (1984-07-01), Nielsen
patent: 4961273 (1990-10-01), Fay
patent: 5218896 (1993-06-01), Furukawa
patent: 5346513 (1994-09-01), Taniguchi et al.

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