Vacuum compatible, high-speed, 2-D mirror tilt stage

Details Vacuum compatible, high-speed, 2-D mirror tilt stage Vacuum compatible, high-speed, 2-D mirror tilt stage

2007-09-25

2007-09-25

Cherry, Euncha P. (Department: 2872)

Optical: systems and elements

Mirror

With support

C359S225100

Reexamination Certificate

active

11132783

ABSTRACT:
A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

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