Vacuum compatible colleting spindle

Details Vacuum compatible colleting spindle Vacuum compatible colleting spindle

1984-10-16

1986-05-20

Briggs, William R.

Chucks or sockets

Expanding

Collet type

118500, 118503, 279 2R, 279106, B23B 3140

Patent

active

045896674

ABSTRACT:
Apparatus is provided in which a colleting and spindle assembly for lifting and rotating a substrate mounting chassis within a high vacuum sputtering chamber is mounted. Lifting and clamping action is accomplished utilizing rolling contact between surfaces produced by rotating a minor shaft with an eccentrically mounted bearing within and relative to a major shaft. A pneumatically-actuated piston mounted on one end of the major shaft drives an internally mounted high helix screw which is prevented from rotating relative to the major shaft thereby producing linear motion of the helix screw in a helix nut resulting in rotational motion of the helix nut relative to the major shaft. The rotational motion of the helix nut is coupled to the minor shaft causing it to rotate relative to the major shaft. Once the spindle assembly has been coupled to the substrate mounting chassis, the major shaft couples rotational motion to the substrate mounting chassis from outside the chamber to inside the chamber.

REFERENCES:
patent: 2852262 (1958-09-01), Parker et al.
patent: 2920894 (1960-01-01), Kreinick
patent: 3191924 (1965-06-01), Haus
patent: 3371650 (1968-03-01), Bohler
patent: 3522014 (1970-07-01), Keller
patent: 4002141 (1977-01-01), Shrader
patent: 4108107 (1978-08-01), Scheuermann
patent: 4314524 (1982-02-01), Deguchi
patent: 4485759 (1984-12-01), Brandolf

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