Coating apparatus – Gas or vapor deposition – Running length work
Patent
1984-02-15
1984-10-23
Smith, John D.
Coating apparatus
Gas or vapor deposition
Running length work
118719, 118720, 118724, 118726, 118733, C23C 1308
Patent
active
044781741
ABSTRACT:
A vacuum coating vessel is provided comprising a casing having a vacuum coating compartment separated from a vapor source compartment by a partition having vapor ports. A slidable shutter plate is provided on the vapor source compartment side of the partition. The shutter plate, in an open position, aligns vapor ports therein with the ones in the partition, and, in a closed, closes the vapor ports with `O`-ring seals. A mechanism is provided for moving the shutter plate away from and then towards the partition at the beginning and end respectively of each stroke to avoid scraping the `O`-rings and to ensure that the `O`-rings are kept as clean as possible. The vapor ports of the shutter plate and the partition are chamfered away from the vapor source compartment so that the `O`-ring sealing surfaces around the vapor ports in the partition are masked when the shutter plate is in the open position. When two or more vapor ports are provided, the length of stroke of the shutter plate is reduced by arranging the vapor ports at an angle of about 45.degree. across the direction of travel of the shutter plate so that the length of stroke is only that required for a single port. It should be noted that vapor actually passes through vapor ports in the shutter plate, while in conventional gate valves vapor passes directly through an opening in the casing when the valve plate is slid to the open position.
REFERENCES:
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patent: 3213825 (1965-10-01), Cooper et al.
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patent: 3524426 (1970-08-01), Ogle, Jr. et al.
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patent: 3649339 (1972-03-01), Smith
patent: 4047624 (1977-09-01), Dorenbos
patent: 4207836 (1980-06-01), Nonaka
patent: 4338883 (1982-07-01), Mahler
patent: 4450186 (1984-05-01), Shinohara
Canadian Patents & Development Limited
Lemon Francis W.
Plantz Bernard F.
Smith John D.
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