Vacuum coating apparatus with rotary-driven substrate carrier

Details Vacuum coating apparatus with rotary-driven substrate carrier Vacuum coating apparatus with rotary-driven substrate carrier

1993-05-05

1995-05-16

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

384100, 384121, C23C 1600

Patent

active

054156947

ABSTRACT:
In a vacuum coating apparatus with a rotary-driven substrate carrier, the bearing of the substrate carrier is implemented as a quasi-hydrostatic rotary transmission feedthrough. For receiving the parts to be coated, a mounting is provided which is operationally connected to a drive shaft. The drive shaft has a bearing disk. In operation this bearing disk is hydrostatically supported wherein the bearing can take place on both sides of the bearing disk via at least one annular channel for each side. The drive shaft is carried radially in the wall of the apparatus and the annular channels are disposed in a spring-supported housing. The bearing disk, in turn, is provided with radial channels which are operationally connected with axial channels of the shaft portion of the drive shaft. In this way the bearing of rotary-driven substrate carriers in the vacuum coating apparatus is solved.

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patent: 5201956 (1993-04-01), Humphrey
patent: 5207835 (1993-05-01), Moore
patent: 5211759 (1993-05-01), Zimmerman

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