Coating apparatus – Gas or vapor deposition – Work support
Patent
1978-11-22
1980-01-22
Kimlin, Edward C.
Coating apparatus
Gas or vapor deposition
Work support
118733, 118 50, 118 501, 414217, 414287, 427 35, 427 38, 427 42, 427250, 427294, 427295, 34242, C23C 1308
Patent
active
041844483
ABSTRACT:
Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the vacuum chamber. At least two lock chambers with substrate holders are positioned on a common axis on opposite sides of the vacuum chamber. Each lock chamber is provided on the side facing the vacuum chamber with a lock valve. The vacuum chamber is likewise provided with lock valves on the sides facing the lock chambers whereby the lock chambers can be coupled selectively with the vacuum chamber through the individual lock valves.
REFERENCES:
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patent: 3620956 (1971-11-01), Gauger
patent: 3656454 (1972-04-01), Schrader
patent: 3756435 (1973-09-01), Steigerwald
patent: 3871394 (1975-03-01), Thegerstrom
patent: 3931789 (1976-01-01), Kakei
patent: 3981791 (1976-09-01), Rosvold
patent: 4015558 (1977-04-01), Small et al.
patent: 4042128 (1977-08-01), Schrader
Aichert Hans
Dietrich Walter
Hauff Alfred
Stark Friedrich
Stephan Herbert
Kimlin Edward C.
Leybold-Heraeus GmbH
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