Vacuum coating apparatus

Details Vacuum coating apparatus Vacuum coating apparatus

2005-09-13

2005-09-13

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298250, C118S718000

Reexamination Certificate

active

06942768

ABSTRACT:
A system for coating band-shaped material, where the band-shaped material travels through at least one process chamber in which there is a vacuum, and at least one cooling roller. On the peripheral surface of each cooling roller are at least two magnetron sputter sources that are arranged separate from one another in magnetron chambers, which are formed by separate magnetron chamber walls and allow each chamber to be evacuated, so the pressure in the magnetron chamber can be maintained higher than that in the process chamber. The magnetron chamber walls and the magnetron sputter sources can be mounted on a common carriage, which is displaceable parallel to the cooling roller axis. The result is the reduction in the maintenance costs in cleaning of the magnetron chamber walls and at the same time improvement of the separation of gas between the magnetron chambers and the process chamber.

REFERENCES:
patent: 4204942 (1980-05-01), Chahroudi
patent: 4298444 (1981-11-01), Chahroudi
patent: 4692233 (1987-09-01), Casey
patent: 5328813 (1994-07-01), Strandjord et al.
patent: 6204480 (2001-03-01), Woodard et al.
patent: 19735603 (1998-11-01), None
Copy of catalog “Sputter Web Coaters”.

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