Vacuum coating apparatus

Details Vacuum coating apparatus Vacuum coating apparatus

1984-04-05

1987-09-08

Niebling, John F.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, 118718, 118719, C23C 1456, C23C 1436

Patent

active

046922334

ABSTRACT:
A vacuum metallizer comprises a vacuum chamber split into a number of sub-chambers by partitions. A material transport mechanism is disposed in one sub-chamber and metallizing sources in the others. Sub-chambers are individually pumped to provide close control of sub-chamber pressures. Sources are activated and when the length of material is drawn past them the metal of the sources is deposited thereon. Each partition comprises two sealed parts, one of which moves with the web transport mechanism while the other remains in the vacuum chamber when the chamber is opened. This enables a close gap to be maintained between partitions and mechanism which in turn restricts gas leakage between adjacent sub-chambers.

REFERENCES:
patent: 3123493 (1964-03-01), Brick
patent: 4014779 (1977-03-01), Kuehnle
patent: 4204942 (1980-05-01), Chahroupi
patent: 4261808 (1981-04-01), Walter
patent: 4313815 (1982-02-01), Graves, Jr. et al.
patent: 4322276 (1982-03-01), Meckel et al.
patent: 4492181 (1985-01-01), Ovshinsky et al.

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