Vacuum coating apparatus

Details Vacuum coating apparatus Vacuum coating apparatus

1985-03-27

1987-09-15

Demers, Arthur P.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C23C 1400

Patent

active

046938036

ABSTRACT:
A vacuum coating apparatus has a housing defining a vacuum chamber in chamber which a working roll is disposed over which material to be processed can be drawn. The chamber is split into several sub-chambers by means of partitions and sputter metallizing sources and glow discharge units are disposed in the chambers. The partitions are adjustable and enable the disposition and function of the apparatus to be altered within the confines of the original apparatus design.

REFERENCES:
patent: 3652444 (1972-03-01), Lester
patent: 4014779 (1977-03-01), Kuehnle
patent: 4026787 (1977-05-01), Kuehnle et al.
patent: 4301765 (1981-11-01), Behn et al.
patent: 4454836 (1984-06-01), Akashi et al.
patent: 4508049 (1985-04-01), Behn et al.
patent: 4526131 (1985-07-01), Shirahata et al.

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