Vacuum coating apparatus

Details Vacuum coating apparatus Vacuum coating apparatus

1992-04-07

1994-02-15

Savage, Matthew O.

Coating apparatus

Control means responsive to a randomly occurring sensed...

Temperature responsive

118 50, 118 63, 118 65, 118405, 118429, B05C 312

Patent

active

052862941

ABSTRACT:
A vacuum coating apparatus for forming a thin film evenly coated over a material to be treated as well as providing excellent productivity. The vacuum coating apparatus includes a chamber, an evacuating device, a fluid supplier, a hood, and a gas reservoir. During operation, the chamber is subjected to a partial vacuum by the evacuating device and filled with treatment fluid. At this time, air at predetermined temperature supplied from the gas reservoir is admitted into the chamber. As a result, the temperature and viscosity of the treatment fluid in the chamber become constant. The material to be treated is then fed into the chamber via an inlet port and an outlet port. An air flow caused by evacuation removes excess fluid on the material at the outlet port, resulting in evenly forming a thin coating film.

REFERENCES:
patent: 4258656 (1981-03-01), Hallgren
Patent Abstracts of Japan, vol. 6, No. 244 (C-138), Dec. 2, 1982, & JP-A-57-145-047, Sep. 7, 1982, Y. Koumura, et al., "Manufacturing of Metal-Coated Optical Fiber".

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