Vacuum coating apparatus

Details Vacuum coating apparatus Vacuum coating apparatus

1994-03-16

1994-12-13

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429815, 20429823, 20429825, 20429828, C23C 1434

Patent

active

053726936

ABSTRACT:
A vacuum coating apparatus has a pot-like tank (2) against whose open side a portion of a substrate (1) can be held sealingly. In the tank (2) there is disposed a target (7). A shut-off plate (9) makes it possible after lowering the substrate (1) to hold this target (7) under vacuum in a source chamber (11) protected against intrusion of air.

REFERENCES:
patent: 4416759 (1983-11-01), Harra et al.
patent: 4450062 (1984-05-01), Macaulay
patent: 4514275 (1985-04-01), Shimada et al.
patent: 4986890 (1991-01-01), Setoyama et al.
patent: 5254236 (1993-10-01), Kinokiri et al.

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