Vacuum coating apparatus

Details Vacuum coating apparatus Vacuum coating apparatus

1994-07-26

1996-07-23

Warden, Robert J.

Coating apparatus

Gas or vapor deposition

Work support

118733, 118207, 118319, 118500, 118693, 20429823, 20429825, 20429826, 20429827, 20429828, 204297W, 269 57, 269 71, 269287, C23C 1600, C23C 1400, B05C 1302, B23Q 125

Patent

active

055385605

ABSTRACT:
A closed cylindrical housing defining a transport chamber has a top plate with a first opening communicating with an entry and exit chamber, and a second opening communicating with a coating chamber. A turntable rotatable about an axis in the transport chamber carries a holder to a first position below the first opening as it carries a like holder to a second position below the second opening. Each holder has thereon a container with a diameter smaller than the first opening but larger than the second opening. A first lifter raises a holder sealingly against the top plate around the first opening, the container thereon passing through the first opening to load or unload substrates. A second lifter raises the other holder so that the container thereon abuts a mask defining the second opening in order to coat a substrate in the container.

REFERENCES:
patent: 3856654 (1974-12-01), George
patent: 3915117 (1975-10-01), Schertler
patent: 4410407 (1983-10-01), Macaulay
patent: 4588343 (1986-05-01), Garrett
patent: 4861565 (1989-08-01), Shekerjian et al.
patent: 5183547 (1993-02-01), Ikeda
patent: 5259942 (1993-11-01), Kempf
patent: 5372693 (1994-12-01), Brauer et al.

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