Vacuum clamping detection method and vacuum clamping detector

Measuring and testing – Fluid pressure gauge

Reexamination Certificate

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C029S740000, C029S064000

Reexamination Certificate

active

10558127

ABSTRACT:
When suction/release-passage-internal pressure Pin is equal to or less than a suction detection pressure Pj, a suction of a workpiece is detected and a transfer operation is started. As long as the suction/release-passage-internal pressure Pin does not rise to pressure having an upper limit value or more of the drop detection range during a transfer, it is recognized that the workpiece is not dropped from the sucker. The drop detection range is computed by adding predetermined allowable deflection width ΔD to the suction/release-passage-internal pressure Pin that is read as reference pressure under the condition that the workpiece is sucked by the sucker.

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patent: 2001-054886 (2001-02-01), None

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