Vacuum chuck rotary seal

Details Vacuum chuck rotary seal Vacuum chuck rotary seal

1989-11-13

1991-11-05

Bradley, Paula A.

Coating apparatus

Work holders, or handling devices

279 3, 51235, 269 21, B05C 1300

Patent

active

050623842

ABSTRACT:
A vacuum chuck apparatus includes a vacuum chuck mounted on one end of a hollow shaft whose other end is connected through a rotary seal to a vacuum source. The seal includes a first member having a cap portion cemented to the shaft end and an axially bored frustoconical projection on its end wall and a second member having a frustoconical socket complementing the projection which partially nests in the socket. The second member has a radial pin loosely engaging a longitudinal slot in a stationary bracket to restrict its rotation and permit its axial movement. A spring loaded pressure plate bears on the outer end face of the seal second member.

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patent: 4194324 (1980-03-01), Bonora et al.
patent: 4535721 (1985-08-01), Yakura

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