Vacuum chuck and suction board

Details Vacuum chuck and suction board Vacuum chuck and suction board

2006-09-25

2010-02-02

Nguyen, Dung Van (Department: 3723)

Abrading

Work holder

Vacuum

C451S398000

Reexamination Certificate

active

07654887

ABSTRACT:
The vacuum chuck according to the present invention is provided with a sucking plate for sucking and holding an object to be sucked, in which a sucking layer made of a porous ceramic and a dense material layer are integrated, the sucking layer being located on the side for sucking the object to be sucked, wherein the dense material layer is formed by impregnating the porous ceramic with a metal.

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