Handling: hand and hoist-line implements – Utilizing fluid pressure – Venturi effect
Patent
1998-04-16
2000-03-07
Kramer, Dean J.
Handling: hand and hoist-line implements
Utilizing fluid pressure
Venturi effect
294902, 294907, 414941, 901 40, 901 47, 269 21, B25J 1506, B25J 1902
Patent
active
060329971
ABSTRACT:
A vacuum chuck having a body portion made of moldable glass or another suitable dielectric material including a top surface and bottom surface, a series of flat lands on the top surface of the body portion for supporting a wafer, and a series of orifices and vacuum lines for drawing a vacuum to secure the wafer in place on the lands of the body portion. A method of manufacturing such a vacuum chuck. A method of aligning a wafer on such a vacuum chuck.
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Elliott David J.
Whitten George D.
Excimer Laser Systems
Kramer Dean J.
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