Vacuum change neutralization method

Details Vacuum change neutralization method Vacuum change neutralization method

1994-01-10

1996-02-20

Hearn, Brian E.

Fishing, trapping, and vermin destroying

361213, H01L 2126, H05F 306

Patent

active

054928621

ABSTRACT:
A vacuum processing method including the steps of generating plasma of a charge neutralizing medium by plasma generating means in a vacuum process chamber, and supplying the charge neutralizing medium in the plasma state to an object during transportion in the vacuum process chamber, thereby neutralizing a charge on the object. With this method, the object can be smoothly transported in a vacuum atmosphere after treatment and adhesion of particles to the object is prevented.

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Translation of JP 57-104218.
Translation of JP 62-026756.

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