Vacuum chamber heater apparatus

Details Vacuum chamber heater apparatus Vacuum chamber heater apparatus

1986-12-12

1988-06-14

Broome, Harold

Electric heating

Heating devices

With heating unit structure

219347, 219354, H05B 310

Patent

active

047513721

ABSTRACT:
A heater apparatus particularly suitable for use in a vacuum deposition apparatus is disclosed. The heater apparatus contains an open structure surrounding the heating element to permit quick evacuation of the apparatus and avoid memory problems attendant with sealed heater tubes used in a high vacuum environment which is repeatedly cycled from vacuum to ambient pressure.

REFERENCES:
patent: 4207456 (1980-06-01), Best
patent: 4531047 (1985-07-01), Canfield et al.
L. M. Fraas et al., "Vacuum Chemical Epitaxy Utilizing Organomablic Sources," , J. Elec. Materials, vol. 15, No. 3, pp. 175-180, May 1986.
L. D. Partain et al., "Vacuum MOCVD Fabrication of High Efficiency Cells for Multi-Junction Application", Space Photovoltaic Research & Tech. Conference, Apr. 30-May 2, 1985, pp. 1-9.
Research on Multiband Gap Solar Cells, SERI Semiannual Control Report, Mar. 31, 1985 to Aug. 31, 1985, submitted on or about Oct. 16, 1985 for initial approval and mailed to listed recipients on or about Dec. 16, 1985.

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