Vacuum-cavity MEMS resonator

Details Vacuum-cavity MEMS resonator Vacuum-cavity MEMS resonator

2006-02-21

2006-02-21

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000, C333S200000

Reexamination Certificate

active

07002436

ABSTRACT:
A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure. The vacuum-cavity MEMS resonators have cantilever beams, bridge beams or breathing-bar beams.

REFERENCES:
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patent: 5963788 (1999-10-01), Barron et al.
patent: 6174820 (2001-01-01), Habermehl et al.
patent: 6429755 (2002-08-01), Speidell et al.
patent: 6628177 (2003-09-01), Clark et al.
patent: 6635509 (2003-10-01), Ouellet

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