Vacuum barrier for excimer lasers

Details Vacuum barrier for excimer lasers Vacuum barrier for excimer lasers

1990-10-10

1992-09-15

Lesmes, George F.

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Structurally defined web or sheet

Including components having same physical characteristic in...

428252, 4284735, 428458, 428408, 372 57, B32B 2706, B32B 1508, H01S 322

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051477114

ABSTRACT:
A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput.

REFERENCES:
patent: 4992323 (1991-02-01), Vogelesang et al.
Shurter et al., "Performance Improvements with Advanced Design Foils in High-Current Electron Beam Diodes", LA-UR 90-1020, Jun. 11, 1989.
R. G. Anderson, R. P. Shurter, E. A. Rose, "Qualification of Diode Foil Materials for Excimer Lasers," Dec. 11, 1989.

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