Abrading – Machine – Combined
Reexamination Certificate
2007-08-13
2009-08-18
Eley, Timothy V (Department: 3724)
Abrading
Machine
Combined
C451S005000, C451S008000, C451S021000, C451S443000, C451S456000
Reexamination Certificate
active
07575503
ABSTRACT:
A method and apparatus for conditioning polishing pads that utilize an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens, and materials handling. The method and apparatus utilize a vacuum capability to pull waste material out of the conditioning pad and through the apertured conditioning disk to evacuate the apparatus through an outlet port, the apparatus may also include self-contained flushing means and a piezo-electric device for vibrating the pad conditioning apparatus.
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Eley Timothy V
Koba Wendy W.
TBW Industries Inc.
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