Vacuum-arc plasma source

Details Vacuum-arc plasma source Vacuum-arc plasma source

1993-11-04

1995-01-10

Breneman, R. Bruce

Chemistry: electrical and wave energy

Apparatus

Vacuum arc discharge coating

20419238, C23C 1432

Patent

active

053804210

ABSTRACT:
An apparatus for the production of coatings in a vacuum, including a rectangular cathode plate and primary and auxiliary anodes, is provided with static and dynamic magnetic stabilizing subsystems. The static stabilizing subsystem comprises linear conductors arranged parallel to the long sides of the cathode plate. The dynamic magnetic stabilizing subsystem includes a series of linear conductors arranged at right angles to the working surface of the cathode plate, activated in sequence. The static and dynamic magnetic stabilizing systems operate to stabilize the electric arc on the working surface of the cathode.

REFERENCES:
patent: 3783231 (1974-01-01), Sablev et al.
patent: 3793179 (1974-02-01), Sablev et al.
patent: 3836451 (1974-09-01), Snaper
patent: 4448659 (1984-05-01), Morrison, Jr.
patent: 5160595 (1992-11-01), Hauzer et al.
patent: 5306407 (1994-04-01), Hauzer et al.

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