Vacuum arc deposition device

Details Vacuum arc deposition device Vacuum arc deposition device

1991-12-19

1994-01-11

Bueker, Richard

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

20429841, 118723VE, C23C 1430

Patent

active

052777146

ABSTRACT:
A vacuum arc deposition device comprising a vacuum vessel with a vacuum arc evaporation source disposed in the vacuum vessel, a plurality of arc current introduction portions are disposed to the vacuum arc evaporation source along with a plurality of arc discharge power sources for supplying arc electric power correspondingly to the plurality of arc current introduction portions. The vacuum arc vapor deposition device provides a large evaporation area and a high film formation rate.

REFERENCES:
patent: 3836451 (1974-09-01), Snaper
patent: 5037522 (1991-08-01), Vergason
patent: 5061684 (1991-10-01), Freller
patent: 5103766 (1992-04-01), Yoshikawa

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