Vacuum arc deposition apparatus

Details Vacuum arc deposition apparatus Vacuum arc deposition apparatus

2006-02-14

2006-02-14

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Vacuum arc discharge coating

C204S192380, C118S7230VE

Reexamination Certificate

active

06998034

ABSTRACT:
An arc evaporation source constituting this vacuum arc deposition apparatus has a plurality of cathodes, a trigger electrode, a trigger drive unit, a shutter, and a shutter drive unit. The trigger drive unit changes over the position of the trigger electrode to thereby position the trigger electrode in front of a desired cathode, and connects/disconnects the trigger electrode to/from the desired cathode in the changed-over position. The shutter covers the fronts of all the cathodes except the desired cathode. The shutter drive unit moves the shutter to thereby change over the cathode not covered with the shutter. Further, the vacuum arc deposition apparatus has a changeover control unit for controlling the shutter drive unit and the trigger drive unit to thereby change over the cathode not covered with the shutter and to thereby position the trigger electrode in front of the cathode not covered with the shutter.

REFERENCES:
patent: 5254237 (1993-10-01), Snaper et al.
patent: 5294322 (1994-03-01), Vetter et al.
patent: 2002-25794 (2002-01-01), None

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