Metal working – Plural diverse manufacturing apparatus including means for... – Binding or covering and cutting
Patent
1996-08-08
1997-08-12
Briggs, William R.
Metal working
Plural diverse manufacturing apparatus including means for...
Binding or covering and cutting
29 2501, 20429825, 414217, 414939, B23Q 714, B65G 106
Patent
active
056552777
ABSTRACT:
Vacuum processing plant with a small footprint for the surface treatment of large-area substrates in a virtually upright position, has a vacuum chamber containing a substrate carrier rotatable about a central axis and with at least one processing station mounted on its periphery. A transfer chamber is also mounted on its periphery and connects it to a load-lock chamber. A first transport mechanism moves the substrates from the transfer chamber in a radial direction in and out of the vacuum chamber, a second transport mechanism moves the substrates in a direction perpendicular to that of the first transport mechanism, between the transfer chamber and the load-lock chamber. A third transport mechanism moving in parallel with the second one doubles the transport capacity between the load-lock chamber and the transfer chamber.
REFERENCES:
patent: 4663009 (1987-05-01), Bloomquist et al.
patent: 4675096 (1987-06-01), Tateishi et al.
patent: 5135608 (1992-08-01), Okutani
patent: 5292393 (1994-03-01), Maydan et al.
patent: 5439547 (1995-08-01), Kumagai
Bruderer Markus
Galdos Aitor
Wagner Rudolf
Balzers Aktiengesellschaft
Briggs William R.
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