Vacuum apparatus for coating an optical substrate

Details Vacuum apparatus for coating an optical substrate Vacuum apparatus for coating an optical substrate

1991-05-22

1992-08-18

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118500, C23C 1424, C23C 1450

Patent

active

051389746

ABSTRACT:
In a vacuum vapor deposition apparatus for coating one side of an optical substrate in an evacuable container, above at least one vapor source, a rotatable support structure is provided. The support structure includes a plurality of at least approximately circular segment-shaped pivotable support plates which are positionable cup-like relative to each other and are supported on a common rotating axle, each pivotable about 180.degree.. Each of the pivotable support plates has support areas on both sides with mechanisms for clamping securely substrates which are to be coated on one side and which sit on the respective supporting areas.

REFERENCES:
patent: 3983838 (1976-10-01), Christensen
patent: 4034704 (1977-07-01), Wossner
patent: 4062318 (1977-12-01), Ban
patent: 4817559 (1989-04-01), Ciparisso

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