Vacuum apparatus and a method of controlling a suction speed the

Details Vacuum apparatus and a method of controlling a suction speed the Vacuum apparatus and a method of controlling a suction speed the

1998-02-05

2000-02-29

Walberg, Teresa

Pumps

Processes

417251, 417440, F04B 1924

Patent

active

060301813

ABSTRACT:
A vacuum apparatus including at least one vacuum pump having at least one stage and high-vacuum and fore vacuum connections, and a connection line communicating a point located between the high vacuum and fore vacuum connections with the high vacuum connection; and a method for controlling a suction speed of the at least one vacuum pump.

REFERENCES:
patent: 4850806 (1989-07-01), Morgan et al.

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