Vacuum apparatus

Details Vacuum apparatus Vacuum apparatus

1988-04-14

1990-06-12

Bueker, Richard

Coating apparatus

Gas or vapor deposition

118719, 118730, 414226, C23C 1652

Patent

active

049323571

ABSTRACT:
A vacuum apparatus comprising a substrate setting disc which is arranged in a conveyance chamber and on which substrates are placed, a drive system which drives and rotates the disc, a cam which is fixed to the disc, switching means to switch signal circuits through the cam, calculation means to receive digital signals generated by the switching operations of the switching means, signals from the drive system and signals from respective processing devices so as to execute calculations, a memory which registers calculated results, and a display unit which displays the registered contents on a screen, rotational positions of the disc being loaded so as to control the hysteretic aspects of the individual substrates within the conveyance chamber with the substrates at the respective positions and addresses held in correspondence.

REFERENCES:
patent: 4584045 (1986-04-01), Richards
patent: 4770121 (1988-09-01), Ebata et al.
patent: 4795299 (1989-01-01), Boys et al.
patent: 4810473 (1989-03-01), Tamura et al.

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