V-MOS imaging array

Electrical transmission or interconnection systems – Nonlinear reactor systems – Parametrons

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357 30, 357 24, 357 55, 307304, 307311, 357 31, H01L 2978, H01L 2714

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active

041737652

ABSTRACT:
A solid state image sensing device comprises an array of picture sensing elements which are MOS transistors formed on a bulk of semiconductor material. The transistors are of a V-MOS configuration and have respective sources, V-shaped gates, and drains. The source-to-bulk diode of a V-MOS picture sensing element functions as a photodiode and is disposed near the surface of the array to receive a respective portion of imagewise illumination. In a preferred embodiment, the drain of the V-MOS picture sensing element is buried in the bulk directly beneath its respective source. The source, in conjunction with its gate, acts as a multiplex switch for the photodiode.

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Tseng et al., 3rd Int. Conf. on The Technology and Application of Charge Coupled Devices, pp. 75 et seq.

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