V-Groove charge-coupled device

Details V-Groove charge-coupled device V-Groove charge-coupled device

1979-05-24

1980-11-18

Munson, Gene M.

Electrical transmission or interconnection systems

Nonlinear reactor systems

Parametrons

357 55, 357 60, 307221D, H01L 2978, H01L 2906, H01L 2904, G11C 1928

Patent

active

042348870

ABSTRACT:
A charge-coupled device shift register is formed in V-grooves provided by anisotropically etching in a substrate. insulated conductive electrodes are provided perpendicular to the V-grooves to form a plurality of parallel shift registers which transfer charges along the length of the V-grooves.

REFERENCES:
patent: 4070690 (1978-01-01), Wickstrom
patent: 4126881 (1978-11-01), von Basse et al.
Kosonocky "Charge-Coupled Devices-An Overview" 1974 Western Electronics Show and Convention Tech. Papers, vol. 18 (9/74), pp. 2/1-2/20.
Bean "Anisotropic Etching of Silicon" IEEE Trans. Electron Devices, vol. ED-25 (10/78), pp. 1185-1193.
Liu "V-Grooved Charge-Coupled Device" IBM Tech. Disclosure Bulletin, vol. 20 (3/78), p. 3851.
Kenney "V-Groove Charge-Coupled Device" IBM Tech. Disclosure Bulletin, vol. 21 (1/79), p. 3110.

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