UV laser annealing and cleaning of deposited metal and dielectri

Details UV laser annealing and cleaning of deposited metal and dielectri UV laser annealing and cleaning of deposited metal and dielectri

1997-11-24

1998-09-29

Ip, Sikyin

Metal treatment

Process of modifying or maintaining internal physical...

Heating or cooling of solid metal

20415741, 134 1, C21D 104

Patent

active

058141650

ABSTRACT:
A method for simultaneously annealing a metal or dielectric line and cleaning metal debris deposited in the vicinity of the line by generating an ultraviolet laser beam, focusing the ultraviolet laser beam onto the line, and exposing the line to the ultraviolet laser beam for a period of time sufficient to melt and reflow the line and evaporate small particles of debris. The method may also be used to repair metal or dielectric lines. Laser ablation forward metal deposition may be used in combination with the UV laser annealing method in order to perform the repair.

REFERENCES:
patent: 4432855 (1984-02-01), Romankiw et al.
patent: 4832798 (1989-05-01), Cvijanovich et al.

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