UV exposure with elongated service lifetime

Details UV exposure with elongated service lifetime UV exposure with elongated service lifetime

1994-03-24

1997-12-09

Dzierzynski, Paul M.

Optical: systems and elements

Having significant infrared or ultraviolet property

359509, 359512, 359820, 359900, 355 30, 355 53, 355 67, G03F 700, H01L 2130, G02B 2700

Patent

active

056966237

ABSTRACT:
In an ultraviolet exposure apparatus, substances contained in an atmosphere contacting a lens surface are reduced, the substances generating accumulations on the lens surface. Openings are formed in the wall of a lens barrel to allow the atmosphere to be replaced by a proper gas. The proper atmospheric gas may be a gas not containing oxygen such as a nitrogen gas, or clean air obtained by intentionally generating accumulations by applying ultraviolet light to source air. A ultraviolet light source is preferably cooled by a cooling system different from the cooling system of a lens optical system.

REFERENCES:
patent: 1969655 (1934-08-01), Mailey
patent: 2339906 (1944-01-01), Barnes
patent: 4443072 (1984-04-01), Ballard
patent: 4616908 (1986-10-01), King
patent: 4676614 (1987-06-01), Ohno
patent: 4699505 (1987-10-01), Komoriya et al.
patent: 4704348 (1987-11-01), Koizumi et al.
patent: 4730900 (1988-03-01), Uehara et al.
patent: 4786947 (1988-11-01), Kosugi et al.
patent: 4825247 (1989-04-01), Kemi et al.
patent: 4871237 (1989-10-01), Anzai et al.
patent: 4974018 (1990-11-01), Komoriya et al.
patent: 5008156 (1991-04-01), Hong
patent: 5061024 (1991-10-01), Keys
patent: 5063582 (1991-11-01), Mori et al.
patent: 5166530 (1992-11-01), McCleary
patent: 5356739 (1994-10-01), Kawasaki et al.
patent: 5425045 (1995-06-01), Hamatani

Affiliated with

Also associated with

Rating

UV exposure with elongated service lifetime does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with UV exposure with elongated service lifetime, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and UV exposure with elongated service lifetime will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1612037