UV erasable EPROM with UV transparent silicon oxynitride coating

Details UV erasable EPROM with UV transparent silicon oxynitride coating UV erasable EPROM with UV transparent silicon oxynitride coating

1984-02-13

1986-04-08

Larkins, William D.

Static information storage and retrieval

Magnetic bubbles

Guide structure

357 30, 357 52, 357 54, 365185, 427 94, 148DIG114, 148DIG43, 148DIG81, G11C 1140, H01L 2710, H01L 2714, H01L 2194

Patent

active

045816220

ABSTRACT:
A silicon nitride film containing from 20 to 70% oxygen, for use as a surface passivation film, has enhanced ultraviolet ray transmissivity while exhibiting the desirable moisture proofness quality of a silicon nitride film.

REFERENCES:
patent: 3629088 (1971-12-01), Frank et al.
patent: 3652324 (1972-03-01), Chu et al.
patent: 4091406 (1978-05-01), Lewis
patent: 4229755 (1980-10-01), Custode
patent: 4253881 (1981-03-01), Hezel
patent: 4257832 (1981-03-01), Schwabe et al.
Scheibe et al, IEEE Trans. on Electron Dev., vol. ED24, No. 5, May 1977, pp. 600-606.

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