Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1982-04-12
1984-04-24
Massie, Jerome W.
Metal working
Method of mechanical manufacture
Assembling or joining
29576B, 29576W, 29580, 148 15, 148187, 156648, 156653, 156657, 1566611, 156667, H01L 2126, H01L 21308
Patent
active
044439334
ABSTRACT:
A method is disclosed for the self-aligned manufacture of a semiconductor device having island insulation obtained by thermal oxidation. An insulating layer (preferably of silicon oxide), a layer of silicon nitride, and a layer preferably of aluminum oxide are provided successively on the semiconductor surface. In the last-mentioned layer a basic mask is formed having apertures at the area of all the semiconductor zones to be formed and at the area of the island insulation zones. From this mask the various processes are carried out via a replica mask obtained in the nitride layer.
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Biren Steven R.
Briody Thomas A.
Massie Jerome W.
Mayer Robert T.
U.S. Philips Corporation
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