Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-08-28
2007-08-28
Thompson, Timothy (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S295000
Reexamination Certificate
active
11125473
ABSTRACT:
As robust hinge post structure for use with torsional hinged devices such as micromirrors and method of manufacturing is disclosed. The fabrication process uses a protective layer such as BARC on the bottom of the aperture used to form the hinge post structure to protect an oxide layer during an etching step. The oxide layer, in turn protects the metal layer at the bottom of the aperture. Therefore, the metal layer, the oxide layer, and the protective layer prevent the erosion and/or pitting of the bottom electrode during a cleaning process, and provide additional support to the structure.
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Baker James C.
DiCarlo Anthony
Franklin Mark A.
Harakas George
Mezenner Rabah
Brady III Wade James
Brill Charles A.
Thompson Timothy
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