Metal fusion bonding – Process – Using high frequency vibratory energy
Reexamination Certificate
2005-02-08
2005-02-08
Stoner, Kiley (Department: 1725)
Metal fusion bonding
Process
Using high frequency vibratory energy
C228S001100, C228S103000
Reexamination Certificate
active
06851597
ABSTRACT:
A machine and method for bonding puncture-type conductive contact members of an interconnect to the bond pads of a bare semiconductor die includes the use of one or two ultrasonic vibrators mounted to vibrate one or both of the die and interconnect. A short axial linear burst of ultrasonic energy enables the contact members to pierce hard oxide layers on the surfaces of the bond pads at a much lower compressive force and rapidly achieve full penetration depth.
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U. S. patent application Publication No. US 2001/0045446 A1, published Nov. 29, 2001.
U. S. patent application Publication No. US 2001/0048018 A1, published Dec. 6, 2001.
Farnworth Warren M.
Hembree David R.
Hess Michael E.
Jacobson John O.
Wood Alan G.
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