Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1976-09-23
1978-11-14
Rutledge, L. Dewayne
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
29574, 148 15, 148174, 156626, 156662, 156657, 250397, 250492A, H01L 2120, H01L 2166
Patent
active
041254180
ABSTRACT:
An alignment marker on a substrate surface is covered with polycrystalline semiconductor material during the growth of an epitaxial layer on the monocrystalline substrate. This polycrystalline material is then removed with a selective etchant to re-expose the marker for use in defining an area for processing at the epitaxial layer surface. Permits accurate alignment between buried layers and regions formed from the epitaxial layer surface. Permits provision of the marker on the substrate when it is undesirable to provide the marker on the epitaxial layer surface. Particularly advantageous for electron image projection exposure of electron-sensitive resists.
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Scott, J. P., "Electron Image Projector with Automatic Alignment", IEEE Trans. on Electron Devices, vol. ED-22, No. 7, Jul. 1975, pp. 409-413.
Rutledge L. Dewayne
Saba W. G.
Trifari Frank R.
U.S. Philips Corporation
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