Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-05-20
2008-05-20
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000, C310S010000
Reexamination Certificate
active
07375797
ABSTRACT:
Techniques for transferring utilities to and from a reticle or wafer stage in a lithography system while minimizing physical disturbances that affect the stage are described. These techniques involve transferring utilities to and from the stage without making physical contact with the stage. Alternatively, utilities are transferred by making physical contact with the stage while the stage is in a stationary position. In addition to transferring utilities to and from the stage, devices such as processing devices, buffers (storage mediums), electrical components, and mechanical components can be placed within the stage to use and/or control the transferred utilities.
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Nikon Corporation
Rutledge D.
Weaver Austin Villeneuve & Sampson LLP
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