Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-01-10
2006-01-10
Spector, David N. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C355S067000, C355S071000
Reexamination Certificate
active
06985280
ABSTRACT:
In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
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Cebuhar Wenceslao A.
Hintersteiner Jason D.
Latypov Azat
Volpe Gerald
ASML Holding N.V.
Spector David N.
Sterne Kessler Goldstein & Fox P.L.L.C.
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