Use of vanadium oxide in microbolometer sensors

Details Use of vanadium oxide in microbolometer sensors Use of vanadium oxide in microbolometer sensors

1993-06-29

1995-09-12

Buczinski, Stephen C.

Electrical resistors

Resistance value responsive to a condition

Photoconductive

25037014, 250334, 250250, 338 14, 338 22R, 343700MS, H01L 3108, H01C 700, G02B 2610

Patent

active

054500532

ABSTRACT:
In a microbolometer infrared radiation sensor, a detector material (VO.sub.2) having a high thermal coefficient of resistance to increase the sensitivity of the apparatus.

REFERENCES:
patent: 3484611 (1969-12-01), Futaki
patent: 3619614 (1974-05-01), Yamaka
patent: 3801949 (1974-04-01), Larrabee
patent: 3896309 (1975-07-01), Halsor et al.
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4654622 (1987-03-01), Foss et al.
patent: 4750834 (1988-06-01), Fateley

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