Use of vanadium oxide in microbolometer sensors

Details Use of vanadium oxide in microbolometer sensors Use of vanadium oxide in microbolometer sensors

1997-08-29

2000-03-14

Buczinski, Stephen C.

Electrical resistors

Resistance value responsive to a condition

Photoconductive

25037014, 250334, 250250, 338 14, 338 22R, 343700MS, H01L 3108, H01C 700, G02B 2610

Patent

active

RE0366153

ABSTRACT:
In a microbolometer infrared radiation sensor, a detector material (VO.sub.2) having a high thermal coefficient of resistance to increase the sensitivity of the apparatus.

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