Use of tungsten filled slots as ground plane in integrated circu

Details Use of tungsten filled slots as ground plane in integrated circu Use of tungsten filled slots as ground plane in integrated circu

1997-07-18

1999-01-12

Thomas, Tom

Active solid-state devices (e.g., transistors, solid-state diode

Bipolar transistor structure

With base region having specified doping concentration...

257572, 257576, 257587, 257598, 257571, 257588, 257621, 257520, 438666, 438667, H01L 2900

Patent

active

058594698

ABSTRACT:
A semiconductor device having the base and collector surrounded by a continuous tungsten filled slot as ground plane. The portion of the tungsten filled slot over the buried layer extends beyond the surface of the buried layer and the portion of the tungsten filled slot not over the buried layer extends beyond the interface between the epitaxial layer and the substrate.

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